Nano Electronic Laboratory

Our research interests

Device physics:

Main field. We are focused on CMOS reliability (High mobility subs + High K dielectrics), 2D semiconductors, transport in mesoscopic systems, non-volatile memories (RS) and sensors

Integrated Circuits (IC):

MOSFET degradation impact on the IC long-term reliability.

Facilities

Testing Laboratory
Microfabrication Laboratory

Standard CMOS measurements

Techniques: I-V / V-I, C-V, multi-freq. C-V, QSCV, D_it calculation

- - Keysight E4980A
  - Keithley 2636B (x2)
  - Cascade Microtech EPS150TRIAX 6’’
  - Keithley 7001
  - EPS-UG-TC150-200C Thermal Chuck (30 – 200 °C)

Low-Temperature Characterization

Techniques: Hall Effect, DLTS, and all techniques,

- - Digital Deep Level Spectrometer: MODEL DDS-12
  - Lake Shore Model CRX-6.5K 2”

Noise Measurements

Techniques: Random Telegraph Noise, Low Frequency Noise

- - Femto DDPCA-300 and DHCPA-100
  - National Instruments PCI-4461

Reliability

Techniques: Pulse I-V, current transients, TDDB, charge pumping

- - Keysight 81150A
  - Agilent MSO-X 3024A / Tektronix DPO70404C
  - Femto DDPCA-300 y DHPCA-100

RF Measurements

Techniques: S-parameters, adaptation

- - - Rhode & Schwarz ZNB40
    - Lake Shore GSG-100-40A

Litography

Techniques: Optical litography up to 50 microns

- - Mutech Spinner
  - Hot-Plate D-Lab MS7-H550-S con sonda de temperatura.
  - UV lamp Figo 818
  - Keithley 7001
  - EPS-UG-TC150-200C Thermal Chuck (30 – 200 °C)